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Micro encapsulation - inductive and capacitive micro sensors
Fractional silicon encapsulation - rotary rate- and acceleration sensors
Micro-case encapsulation - pressure sensors
3D path dispensing - gaskets and gluing path of cases
- Fully automatic Mixer, Dispenser & AOI on one platform
- Positioning accuracy ±30 µm @ 3 sigma
- Dispensing dot ±0,2 µl @ 6 sigma
- Volume dispensing and 3D dispensing path ±0,5 µl @ 6 sigma
- Mixing accuracy < 1%
- Setup time < 5 min
- Machine capability cmk > 2,0
- Availability > 97%
(800 kb)
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